Gaya APA

NBE), P, S, N, (, B, E, A. (2013). A new experimental approach to evaluate plasma-induced damage in microcantilever (Vol. 17, No. 2, Tahun). : American foundations information service.

Gaya MLA

NBE), Pengetsaan, Sinar, Netral, (neutral, Beam, Etching, Atau. "A new experimental approach to evaluate plasma-induced damage in microcantilever". Vol. 17, No. 2, Tahun : American foundations information service, 2013. Text.